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Imazono, Takashi; Koike, Masato
no journal, ,
Soft X-ray emission spectroscopy is a powerful tool for a nondestructive evaluation technique for the electronic structure of a buried layer such as an absorber in thin-film solar cells. In our previous study, a wide band W/B
C multilayer grating spectrograph has been successfully developed, but the detection area cannot cover the energy range of 1-3.5 keV, in which the characteristic X-ray lines of Cu-
(0.9 keV), In- (3.4 keV), Se- (1.4 keV) from a CIS solar cell are included. We newly developed a wide band Ni/C multilayer grating to cover the energy range from 1 keV to 3.5 keV at a constant incidence angle.
Imazono, Takashi; Koike, Masato; Kuramoto, Satoshi*; Nagano, Tetsuya*; Koeda, Masaru*
no journal, ,
We designed a flat-field soft X-ray spectrometer to detect X-rays from 1 to 3.5 keV emitted from the CIS absorber consisting of Cu, In, and Se in a CIS solar cell. We invented a wideband multilayered grating, which was coated with an aperiodic Ni/C multilayer on a laminar-type varied-line-spacing grating, to cover the whole energy range at a constant angle of incidence. Since there is no mechanical movement of the grating and a detector, the spectrometer can provide quick and accurate measurements in the 1-3.5 keV range as well as high resolution analysis.
Imazono, Takashi; Koike, Masato; Kuramoto, Satoshi*; Nagano, Tetsuya*
no journal, ,
We designed a flat-field soft X-ray spectrometer to detect the L X-rays from CIS thin-film solar cells. In the case of conventional spectroscopy instruments such as wavelength-dispersive X-ray spectrometer and energy-dispersive one, it is difficult to cover the whole energy range of 1-3.5 keV, which includes the L X-rays of Cu, Se and In consisting of a CIS absorber layer, without any mechanical movement for wavelength scanning, i.e., at a constant angle of incidence. To solve this problem, an aperiodic Ni/C multilayer is innovated and applied to a wideband multilayer grating covering the energy range of 1-3.5 keV at a constant angle of incidence.
Imazono, Takashi
no journal, ,
A flat-field spectrograph equipped with an aperiodic Ni/C multilayer grating with coverage of the 1-3.5 keV range at a fixed incident angle has been developed. The multilayer coating consists of two kinds of 5.6 nm thick bilayers. One is a conventional Ni/C multilayer having the ratio of Ni thickness to the period of 0.5 and the number of layers of 79. The topmost layer is carbon. The other is a single C/Ni bilayer of Ni thickness ratio of 0.8, which means the deposition order is reversed. Consequently, the C layer just under the topmost Ni layer is a continuous layer of 3.92 nm thickness. The aperiodic multilayer was coated on a laminar grating having a grating constant of 1/2400 mm, groove depth of 2.8 nm, and duty ratio of 0.5. The diffraction efficiency of the multilayer grating varies from 0.8% to 5.4% in 2.1-3.3 keV, and is significantly improved up to 7, 4470 and 102 times higher at 2.1 keV, 2.3 keV and 3.0 keV, respectively, than that of before multilayer deposition.